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Description
The system is widely used for various CVD experimental reaction temperature at 1100deg C, can also be used for: vacuum sintering, vacuum protective atmosphere sintering, nanomaterials preparation, battery materials preparation and other research fields
Main components:
1. The MiNi type tubular furnace;
2. Three road float gas ratio;
3. Vacuum pump;
4. The thick wall silicone tube vacuum piping
technical parameters
Champer type:Open type
Display mode :Touch screen
Limiting temperature:1200deg C
Working temperature:1150deg C
Heating rate:20deg C(suggestion:10deg C/min)
Heating zone:Single
Heating zone length:220mm
Constant temperature district:110mm
Furnace tube material:High purity quartz
Routine furnace tube diameter:50mm
:60mm
The furnace tube length:700mm
Packing type:Stainless steel vacuum flange
Gas tightness:Vacuum flange and corundum furnace tube up to4.03×10-3Pa
Control mode:PID Temperature control
Temperature control accuracy:±1deg C
Temperature measurer:K-Thermocouple
Electrical certification:CE
Power supply:220V 50Hz～60Hz
Total power:2.5KW
Gas channels:Three kinds of gas source can be attached
The flow meter:Float flowmeter
A road range:10～100ml/min
B road range:16～160ml/min
C road range:25～250ml/min
Pneumatic pressure:-0.1～0.15 MPa
Warranty :12 months warranty, lifetime warranty
Accessories included
:Quartz tube, vacuum flange, furnace tube jam, type O sealing ring, protective gloves, crucible furnace hook, specification, ptfe tube, stainless steel card sets of joints, stainless steel bellows, KF adapter, 5 mm Allen wrench
The size of a complete set:L700mm E600mm H1190mm
1200C CVD system tube furnace
